Xanadu Quantum Technologies Limited and Mitsubishi Chemical are stepping up their collaboration to use quantum computing to tackle a major challenge in next-generation semiconductor manufacturing: blurring during extreme ultraviolet (EUV) lithography.
The second phase of the Canada-Japan partnership will build on earlier work demonstrating that quantum algorithms can model key optical properties of photoresist materials used in EUV lithography. The companies now aim to turn those simulations into a production-ready workflow capable of identifying materials that can reduce radiation-induced blur.
EUV lithography is critical to manufacturing advanced chips used in AI, mobile devices and high-performance computing. But radiation-induced blurring — an inherently quantum phenomenon — presents a significant challenge for classical simulation methods.
Under the new phase, parameters generated through Xanadu’s quantum simulations will be integrated into Mitsubishi Chemical’s multi-scale models to predict blur. The companies say the goal is to create a fault-tolerant quantum computing (FTQC)-ready software pipeline that could accelerate the discovery of semiconductor materials designed to prevent blurring.
Xanadu plans to demonstrate how quantum computing could contribute to the development of EUV resist materials and provide a roadmap for moving the technology toward industrial use.
The project is backed by innovation programs from both governments, including the National Research Council of Canada Industrial Research Assistance Program (NRC IRAP) and Japan’s Strategic Innovation Promotion Program (SIP). The relevant SIP project is led by the National Institute of Advanced Industrial Science and Technology (AIST) and the Global Research and Development Center for Business by Quantum-AI Technology (G-QuAT).
“Our collaboration with Mitsubishi bridges quantum simulation and semiconductor fabrication, eliminating a critical manufacturing bottleneck and securing a competitive advantage for next-generation semiconductor technology. The funding from both the Canadian and Japanese governments underscores the importance of this partnership to advance the semiconductor industry globally,” said Christian Weedbrook, Founder and Chief Executive Officer of Xanadu.
The latest initiative builds on the companies’ first phase, in which they demonstrated the potential of quantum algorithms to accurately simulate aspects of EUV resist materials.
“This partnership expands on Mitsubishi’s previously successful collaboration with Xanadu, where we demonstrated the utility of quantum computing in simulating EUV resist materials for semiconductor manufacturing,” said Qi Gao, Senior Chief Scientist at Mitsubishi Chemical. “With support from national innovation programs and research organizations in both countries, we’re excited to bring together Canadian and Japanese expertise in quantum computing and materials science.”
The collaboration also highlights a broader push to connect quantum research with industrial applications in both countries.
“This project is a great example of connecting cutting-edge quantum computing research with real industrial challenges. In the critical field of semiconductor materials development, we expect this Japan-Canada collaboration to accelerate the real-world implementation of quantum technology. At SIP, we look forward to the new industrial value this initiative will create,” said Masahiro Horibe, Sub-Program Director, Cross-ministerial SIP and Deputy Director, G-QuAT, AIST.
Xanadu has previously received advisory services and more than $800,000 in NRC IRAP funding for quantum-computing research across several projects, helping establish the foundation for the latest work.
The companies say the expanded partnership could provide a blueprint for quantum-driven material discovery, while laying the groundwork for commercial applications of early FTQC systems in semiconductor manufacturing.
